Experiences
MEMS experience at Bosch goes back numerous generations of automotive sensors produced since 1994. Starting with integrated pressure sensors the product portfolio diversified rapidly. Today a large number of applications are based on Bosch‘s MEMS process platforms. Our process engineering is attended to the development and continuous optimisation of key MEMS technologies. A huge pool of experience is available in our R&D divisions.
Inertial sensors
Bosch‘s inertial sensors are based on surface micromachining. Key procedures like sacrificial etching or deep reactive ion etching have been developed to meet the demands of high volume throughput.
Pressure sensors
Pressure sensors have been realized in bulk and surface micromaching techniques making use of optimized thin film properties and reliable batch processes concepts.
Inertial sensors
Bosch‘s inertial sensors are based on surface micromachining. Key procedures like sacrificial etching or deep reactive ion etching have been developed to meet the demands of high volume throughput.
Pressure sensors
Pressure sensors have been realized in bulk and surface micromaching techniques making use of optimized thin film properties and reliable batch processes concepts.
