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A MEMS acceleration sensor detects fine movements and controls them. This can be the case to monitor the movement for saving electricity or prevent damage caused by the vibration.
MEMS Sensors can measure a temperature and control a device, e.g. give alarm in case the measured object is overheated, or simply indicate the surrounding temperatur, e.g. in outdoor activities as a parameter of weather condition.
The level of a fluid in a reservoir can be measured by the pressure of a column.