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Our experience

MEMS experience at Bosch goes back several generations of automotive sensors produced since 1994. Starting with integrated pressure sensors, the product portfolio has diversified rapidly. Today a large number of applications are based on Bosch‘s MEMS process platforms. Our process engineering is focused on the development and continuous optimisation of key MEMS technologies. A huge pool of experience is available in our R&D divisions.

 


 

Experience

MEMS experience at Bosch goes back several generations of automotive sensors produced since 1994. Starting with integrated pressure sensors, the product portfolio has diversified rapidly. Today, a large number of applications are based on Bosch‘s MEMS process platforms. Our process engineering is focused on the development and continuous optimisation of key MEMS technologies. A huge pool of experience is available in our R&D divisions.

Inertial sensors

Bosch‘s inertial sensors are based on surface micromachining. Key procedures like sacrificial etching or deep reactive ion etching have been developed to meet the demands of high-volume throughput.

Pressure sensors

Pressure sensors have been produced using bulk and surface micromaching techniques, taking advantage of optimized thin-film properties and reliable batch processes concepts.